摘要：

关键词：电感耦合等离子体 等离子体源 空间推进 射频 等离子体诊断 

单位：Research Institute of Applied Mechanics and Electrodynamics of the Moscow Aviation Institute National Research University 5 Leningrad Rd. Moscow 125080 Russia Physical Department Moscow State University named alter M. V. Lomonosov Lenin Hills Moscow 119991 Russia