Numerical Simulation of Particle Densities Distributions in Atmospheric Pressure Ar/SiH4/H2 Mixed Plasma Under Very High Frequency Excitation
ZHUANG Juan SANG Chaofeng WU Mengxue WANG Dezhen
高电压技术
2013年第09期
摘要：
关键词：放电等离子体 激励频率 数值模拟 大气压力 密度分布
单位：School of Physics and Optoelectronic Technology Dalian University of Technology Dalian 116030 China
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