Simulation of Discharge Plasma in Mid-frequency Pulsed DC Magnetron

QIU Qingquan QU Fei GU Hongwei ZHANG Guomin DAI Shaotao 高电压技术 2013年第10期

摘要：

关键词：放电等离子体脉冲磁控溅射脉冲直流模拟系统中频

单位：Institute of Electrical Engineering Chinese Academy of Sciences Key Laboratory of Applied Superconductivity Beijing 100190 China

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