摘要:本文介绍了基于总线集成控制技术设计的SOI器件高温环境实验装置的智能控制系统。该系统集信号检测、实时全程监控、自动记录及故障报警等功能于一体,完全满足SOI器件对高温环境实验的要求。实验表明,经过该系统测试后的产品性能,在可靠性、精确度和工作效率等方面,比现有人工定时定机监测方式有明显的改善和提高。
关键词:soi器件 高温环境实验 动态监控 总线
单位:西安理工大学; 西安710048; 华东光电集成器件研究所; 蚌埠233042
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