摘要：
关键词：信号 超精密排列技术 纳米位移测量系统 微分 混合排列
单位：College; of; Electrical; and; Automatic; Engineering; Nanjing; Normal; Univ.; Nanjing; 210042; China; Automation; College; Southeast; Univ.; Nanjing; 210096; China; Department; of; lnformation; Network; Engineering; Aichi; Institute; of; Technology; Toyoda; 470-0392; Japan
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